发明名称 Reduced parasitic capacitance semiconductor devices
摘要 Semiconductor devices comprise a substrate having a semiconductor disposed thereon with a layer of dielectric material, less than 10 microns thick, disposed about the semiconductor; the dielectric layer has a bond pad disposed on its upper surface a via lined with an electrically conductive material and extending between the bond pad and the semiconductor form an electrically conductive path between the semiconductor device and the bond pad.
申请公布号 US6310394(B1) 申请公布日期 2001.10.30
申请号 US19980139685 申请日期 1998.08.25
申请人 TYCO ELECTRONICS 发明人 ANAND YOGINDER;CHINOY PERCY BOMI
分类号 H01L23/29;H01L23/485;H01L23/66;(IPC1-7):H01L23/34 主分类号 H01L23/29
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