| 摘要 |
PROBLEM TO BE SOLVED: To provide a general-purpose hand for conveying substrates, capable of conveying various substrates with little deflection without changing the hand even when the substrate is diagonally or vertically gripped and conveyed after the substrate is taken out of a diagonally or vertically installed cassette after various substrates having different sizes are conveyed to one production line. SOLUTION: This general-purpose hand for conveying substrates is provided with a pair of long thin support plates 22 for supporting a substrate 1 from the back surface, a cantilever supporting device 24 for supporting a pair of support plates in a cantilever state, a distance adjusting device 26 provided on the cantilever supporting device and for changing the distance between a pair of support plates, sucking devices 28 having a plurality of suction cups 27 on the front surfaces of the support plates and for selectively operating the suction cups, and tip hook devices 30 having tip hooks 29 on the tips of the support plates. The distance between the support plates 22 is changed to adjust the support distance in accordance with the various substrates having the different sizes, and the substrate is conveyed in the support position with little deflection deformation.
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