| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for cleaning an object to be cleaned which improves cleanability, does not cause the composition change of each detergent and a rinsing detergent, facilitates the control of a cleaning solution, and reduces the loss of the cleaning solution to reduce the running cost when the object is cleaned by a hydrocarbon containing an additive and rinsed by a cyclic fluorohydrocarbon solvent. SOLUTION: The method includes the first cleaning process for cleaning the object by the first detergent containing the additive and a hydrocarbon, the second cleaning process for rinsing the object to which the detergent is adhered by using a hydrocarbon, and the third cleaning process for making the rinsed object contact the second detergent containing a cyclic fluorohydrocarbon or an organic solvent and the cyclic fluorohydrocarbon.
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