Method of and apparatus for coating a substrate with a coating material having an even thickness

摘要

A substrate is placed on a support surface of a table. The support surface has a flatness of 2 mum or less. The table has a plurality of holes in the surface. A vacuum is created in the holes to bring the substrate into close contact with the support surface. This eliminates deformations of the substrate, such as twisting and curving. A coating die is moved above the table to apply a coating material onto the substrate. Consequently, a coating having a constant thickness is formed on the substrate.