| 摘要 |
PURPOSE: A method for electrically contacting a semiconductor device inspecting apparatus is provided to prevent a protrusion electrode of the semiconductor device from being damaged in its vertex, by using at least one contactor of a quadrangular pyramid protruding toward the semiconductor device. CONSTITUTION: An electrical contact apparatus having at least one contactor(36) of a quadrangular pyramid protruding toward the semiconductor device(12) is prepared. The inclined line(42) or inclined surface(44) of the contactor comes in contact with the protrusion electrode(18) so that the contactor is in electrical contact with the protrusion electrode.
|
