| 摘要 |
PURPOSE: A microelectromechanical systems is provided to achieve improved transient thermal response and improved thermal efficiency, by eliminating the need to be heated with the arched beam. CONSTITUTION: A microelectromechanical structure includes first and second spaced-apart supports(102a,102b) on a microelectronic substrate(100) and an arched beam(110a) that extends between the first and second spaced-apart supports and that further arches upon application of heat thereto to thereby cause displacement of the arched beam, a heater(120) on the arched beam that applies heat to the arched beam and displaces with the arched beam as the arched beam displaces, a second arched beam(110b) that extends between the first and second spaced-apart supports, and a coupler on the first and second arched beams, wherein the heater is on and displaces with the coupler.
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