| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature-measuring device and a method thereof capable of measuring temperature with high accuracy, even when it is used for a long time. SOLUTION: In the temperature-measuring device 10, a resistance bulb 102 is coated with a coating member 105 consisting of a fluororesin; the circumference of the member 105 is surrounded with a gap by double tubes 106 consisting of a fluororesin to be protected from the outside; the tubes 106 are inserted into a quartz glass tube 101 and the resistance bulb 102 is placed in the APM in a cleaning bath 60. The tubes 106 are connected to an N2 gas feed tube 111, that feeds the N2 gas in the top end of the quartz tube 101.
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