| 摘要 |
PROBLEM TO BE SOLVED: To provide a hydrogen gas sensor, utilizing a characteristic of a Pd-Ag alloy layer storing hydrogen to expand. SOLUTION: In this hydrogen gas sensor, a Pd or Pt thin film is formed on the Pd-Ag alloy layer deposited on a substrate, and the expansion of the Pd-Ag alloy layer caused by the hydrogen storage is detected as strain of the substrate. After SO2 treatment of the Pd-Ag alloy layer, the Pd or Pt thin film can be laminated.
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