| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a system for correcting spatial inhomogeneity of light existing in irradiating light or a diffraction grating type optical modulator without reducing an output. SOLUTION: The diffraction grating type optical modulator includes a diffraction grating type optical modulator activated to make a plurality of orders of diffraction outputted, a light source to supplies light to the diffraction grating type optical modulator, an output system arranged to receive the light of one order of diffraction from the diffraction grating type optical modulator, a detecting element arranged receive the light of one different order of diffraction from the diffraction grating type optical modulator and then to prepare a signal indicating an output from the diffraction grating type optical modulator, an electronic drive system reacting to a data stream for operating the diffraction grating type optical modulator, and a feedback system connected to a detecting element and an electronic drive system and reacting to a signal for correcting the diffraction grating type optical modulator. |
