发明名称 ORGANIC THIN-FILM EL DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a high-fineness organic thin-film EL device which forms and separates electrode lines at a pitch as fine as hundred microns by using a pattern mask on a substrate in a vacuum vapor deposition method. SOLUTION: This organic thin-film EL device has the electrode lines formed by superposing partly of plural electrodes 15a and 15a on each other. The apertures of the pattern mask for forming the electrode lines are formed of a structure taking bending and distortion into consideration. One electrode line is formed by plural times of vapor deposition by moving the pattern mask described above.
申请公布号 JP2001296819(A) 申请公布日期 2001.10.26
申请号 JP20000115377 申请日期 2000.04.17
申请人 NEC CORP 发明人 UTSUKI KOJI;TAMEGAI MASASHI
分类号 H05B33/10;C23C14/24;G09F9/00;G09F9/30;H01L27/32;H01L51/50;H01L51/56;H05B33/12;H05B33/14;H05B33/26 主分类号 H05B33/10
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