Method and device for transporting wafers in connection their production and/or processing uses gas-operated flow-through nozzles to create gas cushions and/or gas jets for moving and/or positioning wafers.

摘要

Gas-operated flow-through nozzles create gas cushions and/or gas jets for moving and/or positioning wafers at least partly without any contact. These nozzles allow a wafer to be centered with regard to a processing position, to movement in a straight line and/or to rotational movement. These nozzles also allow wafers to be removed from a tray and/or returned to it.