| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage device capable of accurately feeding the stage in a feeding direction without generating inclination and without processing a guiding mechanism of the stage with high accuracy. SOLUTION: In the stage device feeding a mover 27 of the stage 11 by means of a driving unit 18 equipped with a pair of driving legs 21 and 22 having each of an expandable deformation part 23 and a shearing deformation part 24, a inclination detector 42 especially detects the inclination of the stage 11, driving voltage superposed by bias voltage accompanied by an offset signal is applied to the expandable deformation part 23 of the driving legs 21 and 22 depending on this detected inclination, and the inclination of the stage 11 is corrected by adjusting the length of the expandable deformation part 23.
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