发明名称 |
ARRAYED PITCH TRANSFER APPARATUS |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide an arrayed pitch transfer apparatus which can obtain pitches having a high precision in about perpendicular direction. SOLUTION: Each claw plate 2 which supports each tray 1 for transfer is provided at both terminal side of the trays 1 for overlapped transfer. Each claw plate 2a, 2b and so on is junctioned with each other by a junction member 3, each claw plate is hung to a claw plate locating at the above by the claw plate 2a lifting from the condition of each claw plate firmly contacted by a transfer mechanism 5, for example, the claw plate 2b becomes in the state of being hung by the claw plate 2a at a distance of a predetermined pitch.</p> |
申请公布号 |
JP2001291759(A) |
申请公布日期 |
2001.10.19 |
申请号 |
JP20000106521 |
申请日期 |
2000.04.07 |
申请人 |
MITSUBISHI ELECTRIC CORP;ADVANCED DISPLAY INC |
发明人 |
ABE HAJIME;YOSHIDA KAZUO;OZAKI KOJI;MATSUI YASUSHI |
分类号 |
H01L21/677;H01L21/68;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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