| 摘要 |
PROBLEM TO BE SOLVED: To provide a galvano-mirror which can be miniaturized and driven by low-voltage. SOLUTION: The galvano-mirror device X1 is provided with a fixing part 1A having an internal space 1B, a moving part 10 turnaby supported in the internal space 1B with respect to the fixing part 1A through torsion bar parts 12a and 12b, a mirror part 15 formed on one surface 10a of the moving part 10, first and second electrode parts 14 and 16 provided in the one surface 10a of the moving part 10 and other surface 10b, respectively, and third and fourth electrode parts 22a, 22b, 31a and 31b opposed to the first and second electrode parts 14 and 16 in fixing part 1A. Moreover, the galvano-mirror device X1 is constituted so as to turn the moving part 10 by electrostatic force when the potential difference is given to at least one side between the first electrode part 14 and the third electrode parts 22a and 22b, and between the second electrode part 16 and the fourth electrode parts 31a and 31b, and a partial area in the one surface 10a of the moving part 10 is shared by the first electrode part 14 and the mirror part 15. |
