| 摘要 |
PURPOSE: An apparatus for storing and moving a cassette are provided to continuously supplies substrate cassettes to a processing system so that system down time is reduced or eliminated. CONSTITUTION: An apparatus for storing substrate cassettes comprises at least one cassette docking station(40) for charging and/or discharging substrates from the cassette; at least one cassette storage shelve(62a-h) adjacent the at least one cassette docking station(40). A cassette stocker(50) comprises the cassette storage shelves(62a-h) adjacent a cleanroom wall(26) and vertically disposed relative to the cassette docking stations(40), and a cassette mover(56) for carrying the cassette between the shelves and the docking stations.
|
