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发明名称
RETICLE, WAFER, MEASURING STEPPER AND METHODS FOR PREVENTATIVE MAINTENANCE
摘要
申请公布号
EP1145080(A1)
申请公布日期
2001.10.17
申请号
EP20000959410
申请日期
2000.08.25
申请人
PHILIPS SEMICONDUCTORS INC.
发明人
LEROUX, PIERRE
分类号
G03F9/00;G03F7/20;H01L21/027;(IPC1-7):G03F7/20
主分类号
G03F9/00
代理机构
代理人
主权项
地址
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