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发明名称
METHOD FOR PRODUCING A HIGH MELTING POINT METALLIC SILICIDE TARGET
摘要
申请公布号
EP0666336(B1)
申请公布日期
2001.10.17
申请号
EP19940921823
申请日期
1994.07.27
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
SATO, MICHIO;YAMANOBE, TAKASHI;KOMATSU, TOHRU;FUKASAWA, YOSHIHARU;YAGI, NORIAKI;MAKI, TOSHIHIRO;SHIZU, HIROMI
分类号
C23C14/34;(IPC1-7):C23C14/34;C04B35/58
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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