发明名称 |
Heat treatment apparatus |
摘要 |
A heat treatment apparatus has a heater 30, which is arranged between a vacuum vessel 2 and a magnetic field generator 20. The electric heater is arranged so as to surround the outer peripheral surface of the vacuum vessel 2, and a fluid cooling section 33 arranged between the electric heater 31 and the magnetic field generator 20.
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申请公布号 |
US6303908(B1) |
申请公布日期 |
2001.10.16 |
申请号 |
US20000644905 |
申请日期 |
2000.08.24 |
申请人 |
NICHIYO ENGINEERING CORPORATION |
发明人 |
YAMAGA ISAO;KOMURO KENJI;KOBAYASHI HIROKI;MIWA KAZUO |
分类号 |
F27D11/02;H01L21/00;(IPC1-7):F27D11/00 |
主分类号 |
F27D11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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