发明名称 Heat treatment apparatus
摘要 A heat treatment apparatus has a heater 30, which is arranged between a vacuum vessel 2 and a magnetic field generator 20. The electric heater is arranged so as to surround the outer peripheral surface of the vacuum vessel 2, and a fluid cooling section 33 arranged between the electric heater 31 and the magnetic field generator 20.
申请公布号 US6303908(B1) 申请公布日期 2001.10.16
申请号 US20000644905 申请日期 2000.08.24
申请人 NICHIYO ENGINEERING CORPORATION 发明人 YAMAGA ISAO;KOMURO KENJI;KOBAYASHI HIROKI;MIWA KAZUO
分类号 F27D11/02;H01L21/00;(IPC1-7):F27D11/00 主分类号 F27D11/02
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