| 摘要 |
PROBLEM TO BE SOLVED: To stably control an output of a laser oscillator by rapidly correcting a change of the laser output due to a disturbance (change of a disturbance factor) of the oscillator. SOLUTION: In order to stabilize the output of the laser oscillator 10 by using a feedback loop 20, a change of a factor to become the disturbance (disturbance 30) for the laser output 3 is applied to the loop 20. Before the change of the output 3 due to the disturbance 30 occurs, the output stabilizing operation of the loop 20 is started. Then, a change amount of the output 3 due to the disturbance 30 is reduced, and an oscillating time is shortened at an unstable output. |
