| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and method for detecting the mark of a material to be worked capable of efficiently detecting the mark of the material to be worked while successively changing the relative position of the material to be worked and a camera even when the set state of the marked material to be worked is rough. SOLUTION: When a measuring mode is started (1), the continuation of the operation even in the case that the measured result is error is set (2). Then, positioning at a measuring position indicated by the coordinates of ( 001, 002) is operated (3), and the measurement of the mark is performed (4). Even when the measured result is error, transition to the following processing is performed based on the setting of (2), and the measurement of the mark is performed at the measuring positions indicated by the coordinates of ( 003, 004), ( 005, 006),.... Then, when the measurement is successful, the process is jumped to N1200 (5, 8, 11), and the measured result is registered, and the measuring mode is ended (15, 16). In this case, the 001, 002,... can be arbitrarily set by a user. |
