发明名称 FLUORINATED SOLVENT COMPOSITIONS CONTAINING OZONE
摘要 A homogeneous non-aqueous compositions containing a fluorinated solvent, ozone, and optionally a co-solvent and the use of these compositions for cleaning and oxidizing substrates is described.
申请公布号 WO0174985(A1) 申请公布日期 2001.10.11
申请号 WO2000US21598 申请日期 2000.08.08
申请人 3M INNOVATIVE PROPERTIES COMPANY 发明人 ZAZERRA, LAWRENCE, A.;BEHR, FREDERICK, E.;PARENT, MICHAEL, J.;RAJTAR, PAUL, E.
分类号 C11D7/02;C11D7/26;C11D7/32;C11D7/50;C11D11/00;H01L21/304;H01L21/306;(IPC1-7):C11D7/50 主分类号 C11D7/02
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