| 发明名称 |
PIEZOELECTRIC ACTUATOR, ITS MANUFACTURING METHOD, AND INK-JET HEAD COMPRISING THE SAME |
| 摘要 |
An actuator for ink-jet heads having a high sensitivity and a high durability. A perovskite oxide is hetero epitaxially grown through an intermediate film on a monocrystalline Si substrate so as to form a monocrystalline piezoelectric thin film the crystal orientation of which is aligned with the Si substrate, thus producing a piezoelectric actuator.
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| 申请公布号 |
WO0175985(A1) |
申请公布日期 |
2001.10.11 |
| 申请号 |
WO2000JP02036 |
申请日期 |
2000.03.30 |
| 申请人 |
FUJITSU LIMITED;KURIHARA, KAZUAKI;NISHIZAWA, MOTOYUKI;KURASAWA, MASAKI;OKAMOTO, KEISHIRO |
发明人 |
KURIHARA, KAZUAKI;NISHIZAWA, MOTOYUKI;KURASAWA, MASAKI;OKAMOTO, KEISHIRO |
| 分类号 |
B41J2/14;B41J2/16;H01L27/20;H01L41/09;H01L41/22;H01L41/316;H01L41/332;(IPC1-7):H01L41/08;B41J2/045 |
主分类号 |
B41J2/14 |
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