发明名称 Method of manufacturing pixel electrode for reflection type display device
摘要 A process of a pixel electrode of a direct-sight type of reflection type liquid-crystal display device is simplified. A pixel electrode 120 of a reflection type liquid-crystal display device is formed of an aluminum film which is formed by sputtering. In forming the aluminum film, moisture is intentionally contained in atmosphere, and also a sample is heated. With this process, aluminum grains grow so that irregularities of mum order is formed on the surface of the aluminum film. The aluminum film thus formed allows the incident light to be irregularly reflected so that it is in a visually white muddy state. This is suitable to the pixel electrode for the reflection type liquid-crystal display device.
申请公布号 US2001029144(A1) 申请公布日期 2001.10.11
申请号 US20010870868 申请日期 2001.05.30
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD., A JAPANESE CORPORATION 发明人 ADACHI HIROKI
分类号 G02F1/1335;G02F1/1343;G09F9/35;H01L21/336;H01L29/786;(IPC1-7):G02F1/133 主分类号 G02F1/1335
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