| 发明名称 |
HEAT TREATMENT APPARATUS |
| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a heat treatment apparatus enabling safe and easy work for heater replacement and having a reduced replacement cost. SOLUTION: The heat treatment apparatus comprises a heat treatment furnace provided with a gas exhausting duct 22 above a heater unit 21 containing a reaction tube and gas exhaust parts 25, 26 on the exhausting duct. The duct can be separated from the heater unit.</p> |
| 申请公布号 |
JP2001280848(A) |
申请公布日期 |
2001.10.10 |
| 申请号 |
JP20000097497 |
申请日期 |
2000.03.31 |
| 申请人 |
HITACHI KOKUSAI ELECTRIC INC |
发明人 |
TANIYAMA TOMOSHI;KOBAYASHI MASAYUKI |
| 分类号 |
F27D17/00;F27B5/14;F27B5/16;H01L21/205;H01L21/22;(IPC1-7):F27B5/14 |
主分类号 |
F27D17/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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