MICRO-STRUCTURE, ITS MANUFACTURING METHOD, OPTICAL SWITCHING DEVICE, OPTICAL SWITCHING UNIT AND PICTURE DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a device having high durability and reliability in an optical switching device driving an optical element with an actuator. SOLUTION: The surface roughness Ra of the connecting surface 15 of the upper surface of an upper electrode 7 to which the optical element 3 and the actuator 6 are connected, is set in the range of about 0.2μto 0.02μ. The surface roughness Ra of this level can be realized by annealing or ion irradiation or the like and the degree of contact between the optical element 3 and the actuator 6 can be enhanced exponentially. For that reason, a high-speed driving is enabled and the optical switching device 50 having high reliability and durability can be provided.