| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an Auger electron spectroscope capable of avoiding a sample from being changed or broken due to one-sided progress of sputtering even if an Auger electron detecting part goes wrong to reduce a detection signal of Auger electrons to zero in the course of operation of the Auger electron spectroscope. SOLUTION: This spectroscope has an electron irradiation part 10 for irradiating the sample with electron rays, an ion sputtering part 12 for sputtering Ar ions to a surface of the sample, the Auger electron detecting part 14 for measuring Auger electrons emitted from a surface of the sample, and an ion sputter control part 16 for stopping the progress of ion sputtering to the surface of the sample. If the detection signal of Auger electrons by the detecting part 14 is reduced to zero in the course of measurement of Auger electrons, the progress of the ion sputtering to the surface of the sample is automatically stopped by a prescribed control signal from the control part 16.</p> |
