METHOD FOR EVALUATING CLEANNESS COMPONENT AND APPARATUS THEREFOR AND CLEANING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a cleanness evaluation method for carrying out quantitative evaluation by easily measuring the amount of particles of dust or the like adhering to the object to be measured with a high reproducibility, an apparatus for the method, and a cleaning method employing the method. SOLUTION: An object 4 to be measured is immersed in degassed water in a measurement tank 3 and the number of particles is counted by a particle counter 17 in a liquid.