发明名称 Single electron MOSFET memory device and method
摘要 A memory device and related methods are described. The memory device includes a plurality of cells, each cell including a MOSFET having a source coupled to a first end of a channel, a drain coupled to a second end of the channel, a gate formed on a gate insulator and extending from the source to the drain and a plurality of conductive islands, each surrounded by an insulator, formed in the channel. The islands have a maximum dimension of three nanometers. The surrounding insulator has a thickness of between five and twenty nanometers. Each island and surrounding insulator is formed in a pore extending into the channel. As a result, the memory cells are able to provide consistent, externally observable changes in response to the presence or absence of a single electron on the island.
申请公布号 US6301162(B1) 申请公布日期 2001.10.09
申请号 US20000619352 申请日期 2000.07.19
申请人 MICRON TECHNOLOGY, INC. 发明人 AHN KIE;FORBES LEONARD
分类号 G11C11/34;G11C11/40;G11C11/404;G11C16/34;H01L21/28;H01L27/108;H01L29/788;(IPC1-7):G11C7/00 主分类号 G11C11/34
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