发明名称 DETECTION CIRCUIT FOR SELF-DETECTION TYPE PROBE AND SCANNING PROBE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a detection circuit capable of adjusting sensitivity of a probe, without impairing a dynamic range characteristic of measurement. SOLUTION: In this detection circuit, a balancing variable resistor 3 is inserted in a resistance bridge circuit 2 which includes a detecting strain gauge G1 and a referring strain gauge G2 of the self-detection type probe 20 and is connected, the resistance bridge circuit 2 is applied with a pair of positive and negative DC voltages +VB, -VB from a DC power source 4 as the bias voltages, and a differential amplifier 5 amplifies a detection voltage V1 and a reference voltage V2 from the resistance bridge circuit 2, so as to output a detection output voltage V3.
申请公布号 JP2001272325(A) 申请公布日期 2001.10.05
申请号 JP20000084923 申请日期 2000.03.24
申请人 SEIKO INSTRUMENTS INC 发明人 SHIMIZU NOBUHIRO
分类号 G01B21/30;G01Q20/04;G01Q60/24;(IPC1-7):G01N13/16 主分类号 G01B21/30
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