| 摘要 |
PROBLEM TO BE SOLVED: To provide a treating system which can more increase the number of substrates which are flowed within a treating system, and to provide an interface device. SOLUTION: Each of buffer cassettes (BC1 and BC2) is constituted so as to be able to house a multitude of substrates, such as 20 sheets or thereabouts of substrates, in the vertical directions and is constituted so as to be able to once house both of the substrates delivered from the side of a third process part 6 via a second subarm mechanism 46 and the substrates delivered from the side of an aligner 2 via the second subarm mechanism 46. |
