| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectrics element having stable high piezoelectric characteristics, an ink jet recording head, and a printer. SOLUTION: There are sequentially laminated a lower electrode 42 (a third layer 423 comprising Ir, a second layer 424 comprising Pt, and a first layer 425 comprising Ir), a Ti layer of 4-6 nm, a piezoelectrics thin film 43, and an upper electrode 44, on a ZrO2 film 32. A 100 plane orientation degree of the piezoelectrics 43 measured by an X-ray diffraction wide angle method is 40-70%, a 110 plane orientation degree of it 10% or less, and a remaining 111 plane orientation degree. Here, the thickness of the lower electrode second layer 424 is 30-50% of the entire thickness of lower electrode 42. |
