发明名称 |
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR |
摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device having structure of preventing floating capacitance so that high frequency characteristics do not deteriorate and to provide a manufacturing method. SOLUTION: AMOS transistor formed on a silicon substrate 1 is included. An impurity diffusion layer 9 for giving potential to a well in such a way that the MOS transistor is surrounded is connected to a third metal wiring layer 14 at an upper layer through plug electrodes 11a, 11b and 11c arranged into an array form. A third metal wiring layer 14 is fixed to the ground potential (ground). |
申请公布号 |
JP2001274261(A) |
申请公布日期 |
2001.10.05 |
申请号 |
JP20000086310 |
申请日期 |
2000.03.27 |
申请人 |
MITSUBISHI ELECTRIC CORP |
发明人 |
FURUKAWA AKIHIKO;YAMAKAWA SATOSHI;HASHIZUME YASUYUKI |
分类号 |
H01L23/52;H01L21/3205;H01L21/822;H01L21/8234;H01L27/04;H01L27/088;H01L29/78;(IPC1-7):H01L21/823;H01L21/320 |
主分类号 |
H01L23/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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