发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device having structure of preventing floating capacitance so that high frequency characteristics do not deteriorate and to provide a manufacturing method. SOLUTION: AMOS transistor formed on a silicon substrate 1 is included. An impurity diffusion layer 9 for giving potential to a well in such a way that the MOS transistor is surrounded is connected to a third metal wiring layer 14 at an upper layer through plug electrodes 11a, 11b and 11c arranged into an array form. A third metal wiring layer 14 is fixed to the ground potential (ground).
申请公布号 JP2001274261(A) 申请公布日期 2001.10.05
申请号 JP20000086310 申请日期 2000.03.27
申请人 MITSUBISHI ELECTRIC CORP 发明人 FURUKAWA AKIHIKO;YAMAKAWA SATOSHI;HASHIZUME YASUYUKI
分类号 H01L23/52;H01L21/3205;H01L21/822;H01L21/8234;H01L27/04;H01L27/088;H01L29/78;(IPC1-7):H01L21/823;H01L21/320 主分类号 H01L23/52
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