POST DEPOSITION TREATMENT OF DIELECTRIC FILMS FOR INTERFACE CONTROL,申请号EP19990970507-传众专利搜索

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发明名称	POST DEPOSITION TREATMENT OF DIELECTRIC FILMS FOR INTERFACE CONTROL
摘要
申请公布号	EP1138067(A1)	申请公布日期	2001.10.04
申请号	EP19990970507	申请日期	1999.10.14
申请人	APPLIED MATERIALS, INC.	发明人	NARWANKAR, PRAVIN, K.;SAHIN, TURGUT;REDINBO, GREGORY, F.;LIU, PATRICIA, M.;TRAN, HUYEN, T.
分类号	H01L21/316;H01L21/28;H01L21/8242;H01L27/108;H01L29/51;(IPC1-7):H01L21/316	主分类号	H01L21/316
代理机构		代理人
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