Thin film phase plate, phase contrast electron microscope with a thin film phase plate and method for preventing the charging of the phase plate increases contrast in electron microscope images while removing image distortion.

摘要

If charged, a phase plate's effect is minimized to increase contrast in a resulting electron microscope image and to remove image distortion. The plate has a thin amorphous carbon and gold or composite conductive film (2) on a microscope's lens screen (1) to adjust the phases of scattered electron waves appearing. In the centre of the lens screen's opening there is a totally circular microscopic electron through hole (3) with a size between 0.05 and 5 mu m.