METHOD FOR GROWING THREE-DIMENSIONAL STRUCTURE CRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide a method for growing a high-quality three-dimensional structure crystal having cavities inside. SOLUTION: This method for growing a three-dimensional structure crystal is characterized in that the method comprises a process for forming a crystal growth prevention film on a substrate, a process for selectively removing a part of the crystal growth prevention film and further selectively removing a part of the substrate to form channels having a depth of a fixed value or higher than it and a process for bringing a crystal constitutent material into contact with the substrate, growing a crystal from the side of the substrate having the channels and forming a three-dimensional structure crystal in a hollow state in spaces between the bottom of the substrate facing to the channels and the crystal.