| 摘要 |
PROBLEM TO BE SOLVED: To provide a mechanism which increases the flow of a cooling fluid passing through an inner portion of a rotatory part of a magnetron. SOLUTION: A vacuum treatment system having a treatment chamber and a rotatory chamber like the magnetron of a PVD chamber is provided, and the rotatory part includes a deflection part to deflect a cooling fluid in a cooling cavity to the inner portion thereof. A base plate of the rotatory part regulates an upper surface of the part, and a magnet holder regulates a lower surface of the rotatory part. A magnet is mounted between the base plate and the magnet holder. The deflection part is mounted between the magnets, one end thereof is disposed to an outer side of the magnetron, and the other end is disposed to the inner portion of the rotatory part. When the rotatory part is rotated, the deflection part deflects the cooling fluid from a side of the rotatory part to drive the fluid to the inner portion of the rotary member. |
