| 摘要 |
PROBLEM TO BE SOLVED: To enable exposure to a belt-like work without exerting tension thereto with an exposure device for transporting the belt-like work by a grip feed system. SOLUTION: The belt-like work W is clamped by a feed grip section 12 and the belt-like work Wb is transported to the downstream side in a transporting direction. During the transportation of the belt-like work Wb, the meandering of the belt-like work Wb is detected and the correction of the meandering is carried out. After the movement of the belt-like work Wb is stopped, the belt-like work Wb is fixed by a work fixing mechanism 21 disposed on the upstream side of an exposure section 3. The transporting moves toward the downstream of the transportation by as much as the extended portion of the belt-like work Wb and the tension exerted thus far on the belt-like work Wb is removed. Next, the belt-like work Wb is attracted and fixed to a work stage and is aligned by moving a mask M. The belt-like work Wb is then subjected to exposure processing.
|
