| 摘要 |
PROBLEM TO BE SOLVED: To shorten start-up time and save man-hours by automatically adjusting all the components of a semiconductor wafer carrier automatic transfer system. SOLUTION: Speed, etc., are measured by a semiconductor wafer carrier, and then the measured data are calculated by a calculation section 4. When the measurement is finished, the measurement results and the comparison results between the measured values and the shreshold are transmitted to a control section 5, which transmits these data to the semiconductor wafer carrier automatic transfer equipment 8 via a communication section 7. In the semiconductor wafer carrier automatic transfer equipment 8, the measurement results and the comparison results are fetched by a control section 10, to adjust operation control parameters.
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