摘要 |
PROBLEM TO BE SOLVED: To provide an assessment unit for cold-cathode field electron emission structure that can assess materials which precisely comprise an electron emitting layer and a structure of the gate electrode, in spite of a simple mechanism. SOLUTION: The assessment unit is equipped with a sample holder 31 for mounting an electron-emitting substance 12, that emits electrons based on the field emission, a heater for heating the electron-emitting substance 12, an electrode 37 disposed above the electron-emitting substance 12 and equipped with an aperture 38 for forming an electric field in the neighborhood of the electron- emitting substance 12, and an anode 43 formed on a support 41 which is disposed above the electrode 37 for forming the electric field.
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