| 摘要 |
PROBLEM TO BE SOLVED: To supply high frequency electric power to a plurality of processing chambers equally from one high frequency power supply. SOLUTION: High frequency electric power is distributed to a plurality of the processing chambers 1, 2 through an electricity supply line 10 from one set of the high frequency power supply 5. Variable capacitors C1, C2 are inserted in distribution lines 7, 8 which branch arborescently from the electricity supply line 10. Current detection devices CT1, CT2 which detect the current which flows to each of variable capacitors C1, C2 are equipped. A difference of the detection values of the current detection devices CT1, CT2 is detected, and a control output is taken out from a control part 16 to the variable capacitors C1, C2 so that the difference may become zero, and the values of the variable capacitors C1, C2 are controlled. |
