| 摘要 |
PROBLEM TO BE SOLVED: To provide an exposure system which shortens the carrying time of a reticle to the carrying-out port of the system by eliminating the moving time of an operator between exposure systems and the time and labor required for retrieving the reticle. SOLUTION: This exposure system 201 is provided with a original plate information transmitting means which transmits the information on the reticle storing compartment 203 of this system 201 when this exposure system 201 is started, the state of the reticle storing compartment 203 changes, or another exposure system 201 connected to this system 201 through a network is connected to this system 201, an original plate information storing means which stores the information on an original plate library transmitted by means of the transmitting means, and an original plate information displaying means which displays the information on the compartment 203. This system 201 is also provided with a original plate carrying-out instruction transmitting means which transmits the carrying-out instruction of the reticle 204, a carrying-out instruction receiving means which receives the carrying-out instruction, and an original plate carrying-out means which carries out the reticle 204 to the carrying-out port of the system 202 upon receiving the carrying-out instruction.
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