| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspecting device capable of observing an internal structure of a laminated substrate and the like more clear. SOLUTION: This X-ray inspecting device is composed so that an X-ray source 21 irradiating an X-ray and an X-ray detecting part 22 detecting the X-ray are opposingly arranged with a sample stage 4 mounting a sample in between, and the X-ray irradiated from the X-ray source 21 and transmitting the sample is detected at the X-ray detecting part 22. It is provided with a support means 26 pivotally supported by a frame body 28 of the device on an axis S3 perpendicular crossing a straight line connecting the X-ray source 21 and a center of an X-ray incidence plane in the X-ray detecting part 22 for supporting the X-ray source 21 and the X-ray detecting part 22, and a driving means 27 rotating the support means 26 using the axis S3 as a rotational axis by adjusting a distance D.
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