PLASMA POLYMERIZATION EQUIPMENT EQUIPPED WITH POWDER FILTERING APPARATUS

摘要

PURPOSE: A plasma polymerization equipment equipped with a powder filtering apparatus is provided to obtain a means which prevents a non-reacted polymeric material from flowing into a pump in advance during the plasma polymerization. CONSTITUTION: In a plasma polymerization equipment, the plasma polymerization equipment equipped with a powder filtering apparatus comprises a certain shaped collection chamber (20) having an inlet (16) connected to an exhaust port of a polymerization chamber and an outlet (17) connected to a vacuum pump; a plurality of bag filters (13) installed inside the collection chamber; and a blocking plate (12) installed in the upper part of the bag filters (13) inside the collection chamber (20).