| 摘要 |
PROBLEM TO BE SOLVED: To prevent formation of pits on the surface of a vibrator in manufacturing the vibrator by wet-etching a base formed of a crystal. SOLUTION: The vibrator 17 is provided with a base 1 formed of a crystal, and metal plated coats 4a, 4b formed of metal selected from among a group of gold, tungsten, molybdenum and an alloy of these elements to coat part of the surface of the base 1. A workpiece with the metal plated coats patterned to the outline of the vibrator 17 is subjected to wet etching. As a result, through holes are thereby formed in areas 3 which are not covered with the plated coats 4A, 4B out of the base 1 to form the vibrator 17. |
