| 发明名称 |
PROCESS FOR CLEANING CERAMIC ARTICLES |
| 摘要 |
A method for cleaning ceramic workpieces such as SiC boats used in semiconductor fabrication is disclosed. The method comprises washing a virgin or used ceramic workpiece with a strong acid and then using a pelletized CO2 cleaning process on the acid-washed component. The inventive method has been found to produce a workpiece having a very low level of metallic and particulate contaminants on its surface.
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| 申请公布号 |
WO0125167(A8) |
申请公布日期 |
2001.09.27 |
| 申请号 |
WO1999US31018 |
申请日期 |
1999.12.23 |
| 申请人 |
SAINT-GOBAIN CERAMICS AND PLASTICS, INC. |
发明人 |
HAERLE, ANDREW, G.;MEDER, GERALD, S. |
| 分类号 |
B24C1/00;B24C3/32;C04B41/53;C04B41/91;C23C16/44;H01L21/00;(IPC1-7):C04B41/91;B08B7/02;C23C16/02 |
主分类号 |
B24C1/00 |
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