| 摘要 |
PROBLEM TO BE SOLVED: To obtain an alicyclic dissolution inhibitor having high performances as the dissolution inhibitor for a pattern-forming material at a low production cost. SOLUTION: This diester of an alicyclic compound is represented by the following formula (1). The method for producing the compound (1) comprises esterifying an alicyclic monocarboxylic acid monoester represented by formula (2) in the presence of an acidic catalyst. Furthermore, the compound represented by formula (2) is obtained by esterifying an alicyclic dicarboxylic acid represented by formula (3) and the method for producing the compound represented by formula (2) is provided. Furthermore, the method for producing the compound (2) comprises esterifying an alicyclic acid anhydride represented by formula (4). |
