| 摘要 |
PURPOSE: A light valve device, a manufacturing method thereof, and an image projection system using the same are provided to be capable of considerably increasing pixel density and improving the performance of the light valve device. CONSTITUTION: A semiconductor device includes a light valve substrate(71). At this time, the light valve substrate includes a transparent support substrate(15), a thin film structure(1) having an integrated transistor group, and an adhesive layer(14) for attaching the thin film structure to the transparent support substrate. At this time, each transistor of the integrated transistor group is made of a channel forming region(5), a source region(6), a drain region(7), a gate oxide layer(8) and a gate electrode(9). The semiconductor device further includes a liquid crystal layer(76) formed on the light valve substrate and an opposite substrate(74).
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