| 摘要 |
The invention relates to the field of materials technology and to protective layers, such as they are used on valve insets or deforming tools. The invention also relates to a method for depositing the same. The aim of the invention is to provide protective layers that are applied to different base materials in a relatively simple, essentially stressfree and adhesive manner. The aim of the invention is also to provide the depositing method therefor. According to the inventive method, the protective layers are deposited by means of solid matter sputtering of a graphite target and/or a target containing a graphite. Carbon monoxide and/or carbon dioxide, acting as a working gas or as a component of the working gas, is/are supplied to the target-related gas discharge and/or the partially identical layer-production-related gas discharge before and/or during the deposit. The aim of the invention is also obtained by protective layers that contain more than 95 atom % of carbon, are provided with a mass density ranging from 1.6 to 2.0 g/cm<3> and plastic hardness values of 5 to 30 GPa or E module values of 50 to 200 GPa. |
