发明名称 MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To solve the problem that moisture absorption reliability cannot be sufficiently obtained owing to coherency with a semiconductor device when semiconductor packaging is carried out by using a thermosetting resin, and to provide the manufacturing method of a semiconductor device that can improve the coherency between the thermosetting resin and the semiconductor device, and the reliability of the semiconductor device. SOLUTION: During the crimping of a semiconductor device 2, a substrate 4 is cooled, thus suppressing heat transfer to the substrate 4 when a thermosetting resin 1 is to be heated, reducing strain since the thermal expansion of the substrate 4 approaches that of the semiconductor element 2, eliminating the crack between the semiconductor device 2 and thermosetting resin 1 or the substrate 4 and thermosetting resin 1, and hence improving the moisture absorption reliability of the semiconductor device.</p>
申请公布号 JP2001257239(A) 申请公布日期 2001.09.21
申请号 JP20000068318 申请日期 2000.03.13
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 YAGI YUJI;ANPO TAKEO
分类号 H01L23/29;H01L21/56;H01L21/60;H01L23/31;(IPC1-7):H01L21/60 主分类号 H01L23/29
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