| 摘要 |
PROBLEM TO BE SOLVED: To stabilize temperature inside a reaction tube by shielding the radiant heat of the reaction tube, to enhance product quality, at the same time, to expand a product wafer region for improving productivity, to reduce the number of dummy wafers for cutting down manufacturing costs, and to decrease the contamination source of the product wafer. SOLUTION: At least, the upper necessary area of a reaction tube 14 is allowed to be opaque 16.
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